ASML's brand HMI, formerly known as Hermes Microvision Inc., is a pioneering leader in e-beam inspection equipment for the semiconductor industry. Since joining forces with ASML in 2016, HMI has become an integral part of their comprehensive lithography portfolio, offering innovative solutions for e-beam inspections. HMI's history dates back to 1998 when it was founded by four visionary scientists who recognized the growing challenges faced by the semiconductor industry.

Over the years, HMI developed advanced electron beam inspection systems to keep up with the evolving technology of IC manufacturing. Their first breakthrough came in 2003 with the development of the eScan300, a powerful e-beam inspection system boasting unique features like LeapNscan mode and long electron gun lifetime. Expanding globally, HMI established branches and subsidiaries in Taiwan, Japan, South Korea, and China.

Their product lineup expanded as well, with the introduction of cutting-edge tools such as the eScan400, eScan320, eXplore, eScan500, eP4, SkyScan5000, and NanoScan3000. In 2016, ASML acquired HMI, forming a symbiotic partnership aimed at propelling the semiconductor industry forward. Today, HMI continues its unwavering commitment to research, development, manufacturing, sales, and service as an integral part of ASML.

Their product portfolio includes the HMI eScan 430, eScan 600, eScan 1000, and eScan 1100, offering fast and flexible e-beam inspection solutions for various chip applications. With ASML's support, HMI is geared towards redefining wafer defect inspection technology and driving innovation in the semiconductor industry