沈阳芯源微电子设备股份有限公司 is a national high-tech enterprise established in 2002 by the Shenyang Institute of Automation, Chinese Academy of Sciences. They specialize in the research, development, production, sales, and service of semiconductor production equipment, providing customers with comprehensive solutions for semiconductor equipment and processes. With headquarters located in Shenyang's Hunnan District and a subsidiary in Shanghai Lingang, the company covers a total area of 40,000 square meters, including advanced cleanrooms and state-of-the-art R&D offices.

Accredited with ISO9001 quality management, ISO14001 environmental management, OHSAS18001 occupational health and safety management, and SEMI-S2 international product safety certifications, Shenyang Xinyuan Microelectronic Equipment Co., Ltd. Their product range includes adhesive, development, cleaning, delamination, and etching equipment, catering to various customer requirements in semiconductor production, advanced packaging, MEMS, LED, OLED, 3D-IC TSV, and PV industries. With their listing on the Shanghai Stock Exchange's Science and Technology Innovation Board, they aim to enhance innovation capabilities and product offerings, delivering advanced semiconductor equipment globally and pushing technological progress in the industry