STS-Elionix is a leading brand that specializes in the nanofabrication of quantum devices through their impressive Electron Beam Lithography (EBL) systems. With a strong focus on resolution, field stitching, overlay errors, and uptime, Elionix delivers exceptional quality and reliability. Their EBL systems have been installed in over 400 research institutes and industrial facilities worldwide since 1975.

Elionix offers a range of products and services to meet the needs of their diverse customer base. Their Research Tools line includes the ELS-Boden Series, available in 200mm and 300mm configurations, which combines ultra-high resolution with excellent throughput. They also offer a complete line of automatic loading systems for seamless operations.

For production purposes, Elionix provides the ELS-Boden Σ Series, featuring a 400MHz high-speed scan clock and a high-speed stage for efficient production. These production tools are available in 200mm and 300mm configurations and come with a full lineup of robotic loaders for enhanced productivity. With 1900 established installations in more than 100 countries, Elionix has solidified its position as a trusted provider of electron beam lithography solutions for cutting-edge research and industrial applications.

Contact Elionix today to learn more about their innovative products and services