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TFE Thin Film Equipment Srl

thin film equipment: main expertise is in PVD Sputtering and Evaporation Process


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TFE Thin Film Equipment Srl is a leading supplier of new and remanufactured deposition equipment for various industries and research centers. With expertise in PVD Sputtering and Evaporation Process Equipment, TFE offers cost-effective solutions with the highest standards of product quality and service. Their product range includes single wafer, batch, and cluster tools for both research and production purposes.

Notable products from TFE include the recently introduced Polygon cluster, which offers multiple configurations with sputtering, pre-etch, anneal, and RTP chambers in a compact design. The Eclipse remanufactured product family provides high throughput and a broad process range, backed by a large installed base. TFE also offers evaporators with a wide selection of sources, chamber sizes, substrate numbers, and process options for demanding applications.

Their R&D oriented sputtering tools come in various configurations and platform types, while their in-line tools are scalable, low CoO, and customizable. With headquarters in Binasco, Italy, TFE has an international presence, ensuring local and professional support to customers across Europe, China, North America, and other Asian countries. Their commitment to delivering cost-effective solutions has made them a trusted partner in industries such as Sensors, Thin Film Solar, MEMS, Semiconductors, and more


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