Beneq Corporation is a leading brand in the field of atomic layer deposition (ALD) technology. With a history dating back to 1984, Beneq pioneered the world's first industrial ALD production and has since become the most recognized provider of ALD equipment and R&D services. Their mission is to develop premium tools for production and research, enabling technological advancements through industrial ALD solutions.

Beneq offers a wide range of products to cater to different needs. For high-capacity wafer production, they provide automated ALD solutions under their Semiconductors line. For academic research and corporate R&D, their Research equipment offers highly flexible ALD systems.

They also offer large-scale, general-purpose ALD production systems (Batch Production) and large-area, roll-to-roll ALD systems (Spatial ALD) for flexible substrates. In addition to their product offerings, Beneq provides coating and R&D services, helping customers explore the potential of ALD technology with minimal risk. Their dedicated support team ensures that customers receive assistance with spare parts, maintenance, training, and upgrades for their ALD tools.

With a commitment to innovation and expertise, Beneq is at the forefront of ALD technology, enabling advancements in various industries such as semiconductors, MEMS, photonics, batteries, and more. Discover the power of ALD with Beneq